Acknowledgements
Sponsors
We would like to thank the sponsors:
- Baden-Württemberg Ministry of Science, Research and Arts (MWK)
- Institut für Mikro- und Informationstechnik (HSG-IMIT)
- PE-Stiftung, St. Georgen
- University of Freiburg
Partners
Hochschule Furtwangen University (HFU)
University of Freiburg
- Department of Microsystem Engineering (IMTEK)